Fluid treatment apparatus and method

Fluid treatment apparatus, comprising:

• first and second spaced-apart surfaces, each having finite dimensions, defining a channel therebetween having an entrance, an exit and an axis extending from said entrance to said exit;
• means for transporting a substrate through said channel, between said first and second surfaces, in a direction substantially parallel to said axis, from said entrance to said exit, Characterized In That
• said apparatus further comprises at least a first row of at least two, spaced-apart fluid jet injectors, said first row being aligned transversely to said axis, the fluid jet injectors of said first row penetrating said first surface and serving to produce a first row of at least two, spaced-apart fluid jets which impinge upon a lower surface of said substrate.
• at least a second row of at least two, spaced-apart fluid jet injectors, said second row being aligned transversely to said axis, the fluid jet injectors of said second row penetrating said second surface and serving to produce a second row of at least two, spaced-apart fluid jets which impinge upon an upper surface of said substrate, said second row of fluid jet injectors being positioned relative to said first row of fluid jet injectors so that if said second row of fluid jet injectors were to be projected onto said first surface, the fluid jet injectors of said second row would be substantially interdigitated with the fluid jet injectors of said first row.

Fluid treatment apparatus, comprising:

• at least a first surface, of finite dimensions, including an entrance edge and an exit edge, said first surface being characterized by a transport axis extending from said entrance edge to said exit edge and a coordinate system including an x-axis which is parallel to said transport axis, a y-axis which lies in a least-squares-fit planar approximation to said first surface and is perpendicular to said x-axis, and a z-axis which is perpendicular to both said x-axis and said y-axis;
• means for transporting a substrate over said surface at a distance from said surface, from said entrance edge to said exit edge along a direction which is substantially parallel to said transport axis, Characterized In That
• said apparatus further comprises at least a first row of at least two, spaced-apart fluid jet injectors and a second row of at least two, spaced-apart fluid jet injectors, said first row being aligned transversely to said transport axis and the fluid jet injectors of said first row penetrating said first surface and serving to produce a first row of at least two fluid jets which impinge upon said substrate, said second row being aligned transversely to said axis and the fluid jet injectors of said second row penetrating said first surface and serving to produce a second row of at least two fluid jets which impinge upon said substrate, said second row of fluid jet injectors being positioned at a greater x-coordinate location than said first row of fluid jet injectors, and at least each of the fluid jet injectors of said second row of fluid jet injectors being inclined toward said entrance edge with each forming an angle with said z-axis, as measured in the counterclockwise direction in a plane defined by said z-axis and said x-axis, which angle is greater than 0 degrees but less than 90 degrees, whereby after said first row of fluid jets is impinged upon said substrate, more than half the fluid associated with said first row of fluid jets flows in a direction substantially opposite to the direction of transport of said substrate.

A method of treating a substrate with a fluid, comprising the steps of:

• transporting said substrate over a surface, of finite dimensions, including an entrance edge and an exit edge and characterized by a transport axis extending from said entrance edge to said exit edge and a coordinate system including an x-axis which is parallel to said transport axis, a y-axis which lies in a least-squares-fit planar approximation to said surface and is perpendicular to said x-axis, and a z-axis which is perpendicular to both said x-axis and said y-axis, said transporting step being carried out at a distance from said surface, from said entrance edge to said exit edge, along a direction which is substantially parallel to said transport axis;
• and
• impinging at least a first row of at least two fluid jets, and a second row of at least two fluid jets, upon said substrate, said first row of fluid jets emanating from a first row of at least two, spaced-apart fluid jet injectors which penetrate said surface and said second row of fluid jets emanating from a second row of at least two, spaced-apart fluid jet injectors which penetrate said surface, at least each of said second row of fluid jets being inclined toward said entrance edge and forming an angle with said z-axis, as measured in the counterclockwise direction in a plane defined by said z-axis and said x-axis, which is greater than 0 degrees but less than 90 degrees, whereby after said impinging step, more than half the fluid associated with said first row of fluid jets flows in a direction substantially opposite to the direction of transport of said substrate.