Memory apparatus using tunnel current techniques
AssigneeOlympus Optical Co., Ltd.
InventorsYoshiyuki Mimura, Hiroshi Kajimura, Toshihito Kouchi, Akitoshi Toda, Yasuo Isono, Hiroko Ohta, Ryouhei Shimizu
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AssigneeOlympus Optical Co., Ltd.
InventorsYoshiyuki Mimura, Hiroshi Kajimura, Toshihito Kouchi, Akitoshi Toda, Yasuo Isono, Hiroko Ohta, Ryouhei Shimizu
Estimating the term…
A scanning tunneling microscope memory apparatus comprises first and second integrated circuit (IC) substrates. First and second cantilevers, which can be moved by piezoelectric elements, are arranged on the first and second IC substrates, respectively. Tunnel current probes are provided on a free end of the first cantilever, and a recording element is provided on a free end of the second cantilever. The first and second cantilevers are spaced from each other and overlap such that the tunnel current probes face the recording element. The first or second substrate includes a charge coupled device (CCD) circuit, a control circuit for controlling the CCD circuit and cantilevers, and a drive circuit having a preamplifier, a write circuit, and a servo circuit.
A memory apparatus using tunnel current techniques, comprising:
A memory apparatus using tunnel current techniques, comprising:
Dependencies are inferred from the claim text.