Device simulator for semiconductor device
AssigneeNEC Corporation
InventorYutaka Akiyama
Life of this patent
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Abstract
It is an object of this invention to make it possible to accurately simulate a manner in which carriers are transferred in a semiconductor device. A Fermi level setting means sets a Fermi level in a sink region of carriers, such as a vertical CCD portion of a CCD, and Boltzmann distribution equation solving means solve a Boltzmann distribution equation to obtain a carrier density in this Fermi level set region. In a CCD, the manner in which carriers are transferred from a photodiode portion to a vertical CCD portion in a CCD can be simulated accurately.
Claims6
A device simulator for a semiconductor device, comprising:
- potential setting means for setting an arbitrary potential in electrodes formed on a semiconductor;
- Fermi level setting means for setting a Fermi setting region in the semiconductor region and a Fermi level in the Fermi setting region;
- and
- Poisson's equation solving means for solving a Poisson's equation in accordance with outputs of said potential setting means and said Fermi level setting means;
- and
- Boltzmann distribution equation solving means for calculating a carrier density from a Boltzmann distribution equation of carriers in accordance with outputs of said Poisson's equation solving means and said Fermi level setting means in the Fermi level setting region which is set by said Fermi level setting means.
A device simulator for a semiconductor device, comprising:
- potential setting means for setting an arbitrary potential in electrodes formed on a semiconductor;
- Fermi level setting means for setting a Fermi setting region in the semiconductor region and a Fermi level in the Fermi setting region;
- Poisson's equation solving means for calculating a internal potential of the semiconductor from Poisson's equation with boundary conditions of the potential set by said potential setting means and the Fermi level set by said fermi level setting means;
- and
- Boltzmann distribution equation solving means for calculating a carrier density from a Boltzmann distribution equation of carriers with the internal potential calculated by said Poisson's equation solving means the Fermi level set by said Fermi level setting means in the Fermi level setting region.
Dependencies are inferred from the claim text.