Method of manufacturing electro-optical devices wherein the electrode is patterned on the modulation layer
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Akira Mase, Toshiji Hamatani, Takeshi Nishi
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Abstract
A method of manufacturing electro-optical devices is described. The method comprises steps of forming a first electrode arrangement on a substrate, coating an electro-optical modulating layer comprising a liquid crystal on the substrate over the first electrode arrangement and forming a second electrode arrangement on the electro-optical modulating layer. The electro-optical modulating layer is prepared by dispersing a liquid crystal in a pre-polymer which can be cured by UV light or other suitable procedures.
Claims29
A method of manufacturing electro-optical devices comprising:
- forming non-linear semiconductor elements and a first electrode arrangement on a substrate;
- coating an electro-optical modulating layer comprising a liquid crystal on said substrate over said non-linear semiconductor elements and first electrode arrangement;
- forming a conductive layer on said electro-optical modulating layer;
- and
- patterning said conductive layer to form a second electrode arrangement.
A method of manufacturing electro-optical devices comprising the steps of:
- forming on a substrate an electric circuit comprising a switching element and a first electrode arrangement;
- forming an electro-optical modulating layer comprising a liquid crystal on said electric circuit;
- forming a transparent conductive oxide layer on said electro-optical modulating layer by sputtering;
- and
- patterning said conductive layer in order to form a second electrode arrangement.
A method for forming an electro-optical device comprising the steps of:
- forming an electrode arrangement and active elements in the form of a matrix on a substrate;
- applying an electro-optical modulating layer comprising a mixture of a liquid crystal and an organic transparent material on said substrate;
- forming a second electrode layer on said electro-optical modulating layer;
- patterning said second electrode layer to form a second electrode arrangement;
- and
- forming a protective coating directly on said second electrode arrangement.
A method for forming an electro-optical device comprising the steps of:
- forming an electrode arrangement and active elements in the form of a matrix on a substrate;
- applying an electro-optical modulating layer comprising a mixture of a liquid crystal and an organic transparent material on said substrate;
- forming a second electrode layer on said electro-optical modulating layer;
- and
- patterning said second electrode layer to form a second electrode arrangement;
- wherein said active elements comprises metal-insulator-metal elements where the insulator comprises Si.sub.x C.sub.y (x+y=1).
Dependencies are inferred from the claim text.