Integrated-optics expansion interferometer in an extension-metrological neutral environment

An interferometer of the Fabry-Perot type formed using integrated-optics technology, comprising:

• a baseplate having waveguides integrated therein;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• a Y-shaped combining element combining the entrance portion and the exit portion into a common waveguide;
• a resonator optically disposed downstream of the common waveguide of the combining element, said resonator being formed from a partially transmitting mirror which is integrated into the baseplate and which stands orthogonally to the waveguide and an end mirror disposed at the other end of the resonator waveguide;
• wherein the resonator waveguide is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections of the integrated waveguide forming the resonator is provided.

A double-beam interferometer formed using integrated-optics technology, comprising:

• a baseplate having waveguides integrated thereon;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• an integrated light splitting device disposed downstream of said entrance portion of the integrated waveguide for splitting an injected primary light onto a reference arm and a measuring arm of waveguides;
• an integrated light coupler for combining light from the reference arm and from the measuring arm, said coupler merging into the at least one exit portion;
• wherein the portion of the waveguide forming the reference arm and the portion forming the measuring arm are both integrated over their entire length in the baseplate;
• wherein at least that portion of the waveguide forming the measuring arm is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections forming the measuring arm is provided;
• wherein the waveguide forming the reference arm is at least one of designed and disposed in the baseplate in such a manner that upon extension of the base plate in a direction of the straight active partial sections of the measuring arm, said reference arm operates in an extension-metrologically neutral manner;
• and
• wherein the reference arm is also disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in a length conforming to the length of the measuring arm, in which the straight active partial sections of the reference arm are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the measuring arm, preferably orthogonally to them in the baseplate and in which a coupling-free mutual minimum spacing of the straight active partial sections and deflecting sections of the integrated waveguide forming the reference arm in relation to one another and in relation to the straight active partial sections and deflecting sections of the measuring arm is provided.

An interferometer of the Fabry-Perot type formed using integrated-optics technology, comprising:

• a baseplate having with waveguides integrated therein;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• a Y-shaped combining element combining the entrance portion and the exit portion into a common waveguide;
• a resonator optically disposed downstream of the common waveguide of the combining element, said resonator being formed from a partially transmitting mirror which is integrated into the baseplate and which stands orthogonally to the waveguide and an end mirror disposed at the other end of the resonator waveguide;
• wherein the resonator waveguide is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections of the integrated waveguide forming the resonator is provided;
• wherein two resonators with resonator waveguides of mutually equal length are integrated into the baseplate, in which the resonator waveguides of both resonators are disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in the baseplate and a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections is provided both within each individual resonator and also between the two resonators;
• and
• wherein the straight active partial sections of the one resonator are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the other resonator, preferably orthogonally to them in the baseplate.

A double-beam interferometer formed using integrated-optics technology, comprising:

• a baseplate having waveguides integrated thereon;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• an integrated light splitting device disposed downstream of said entrance portion of the integrated waveguide for splitting an injected primary light onto a reference arm and a measuring arm of waveguides;
• an integrated light coupler for combining light from the reference arm and from the measuring arm, said coupler merging into the at least one exit portion;
• wherein the portion of the waveguide forming the reference arm and the portion forming the measuring arm are both integrated over their entire length in the baseplate;
• wherein at least that portion of the waveguide forming the measuring arm is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections forming the measuring arm is provided;
• wherein the waveguide forming the reference arm is at least one of designed and disposed in the baseplate in such a manner that upon extension of the baseplate in a direction of the straight active partial sections of the measuring arm, said reference arm operates in an extension-metrologically neutral manner;
• wherein the reference arm is also disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in a length conforming to the length of the measuring arm, in which the straight active partial sections of the reference arm are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the measuring arm, preferably orthogonally to them in the baseplase and in which a coupling-free mutual minimum spacing of the straight active partial sections and deflecting sections of the integrated waveguide forming the reference arm in relation to one another and in relation to the straight active partial sections and deflecting sections of the measuring arm is provided;
• and
• wherein the deflecting sections between two successively following straight active partial sections within the integrated waveguide forming the measuring arm or within that forming the reference arm are respectively formed by a semicircular arcuate piece or by a pair of quadrant-shaped arcuate pieces, disposed in mirror image, with a straight connecting piece disposed therebetween.

A double-beam interferometer formed using integrated-optics technology, comprising:

• a baseplate having waveguides integrated thereon;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber,
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• an integrated light splitting device disposed downstream of said entrance portion of the integrated waveguide for splitting an injected primary light onto a reference arm and a measuring arm of waveguides;
• an integrated light coupler for combining light from the reference arm and from the measuring arm, said coupler merging into the at least one exit portion;
• wherein the portion of the waveguide forming the reference arm and the portion forming the measuring arm are both integrated over their entire length in the baseplate;
• wherein at least that portion of the waveguide forming the measuring arm is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections forming the measuring arm is provided;
• wherein the waveguide forming the reference arm is at least one of designed and disposed in the baseplate in such a manner that upon extension of the baseplate in a direction of the straight active partial sections of the measuring arm, said reference arm operates in an extension-metrologically neutral manner;
• wherein the reference arm is also disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in a length conforming to the length of the measuring arm, in which the straight active partial sections of the reference arm are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the measuring arm, preferably orthogonally to them in the baseplate and in which a coupling-free mutual minimum spacing of the straight active partial sections and deflecting sections of the integrated waveguide forming the reference arm in relation to one another and in relation to the straight active partial sections and deflecting sections of the measuring arm is provided;
• wherein the deflecting sections between two successively following straight active partial sections within the integrated waveguide forming the measuring arm or within that forming the reference arm are respectively formed by a semicircular arcuate piece or by a pair of quadrant-shaped arcuate pieces, disposed in mirror image, with a straight connecting piece disposed therebetween;
• and
• wherein the loops, composed of straight active partial sections and circular-arcuate deflecting sections of the waveguide forming the measuring arm and/or of that forming the reference arm are disposed in the form of at least one oval spiral, in which a waveguide partial section extends from the innermost active partial section, crossing the other active partial sections of the one side of the oval spiral, to a region situated outside the oval spiral.

An interferometer of the Fabry-Perot type formed using integrated-optics technology, comprising:

• a baseplate having waveguides integrated therein;
• an entrance optical fiber supplying primary light form a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• a Y-shaped combining element combining the entrance portion and the exit portion into a common waveguide;
• a resonator optically disposed downstream of the common waveguide of the combining element, said resonator being formed from a partially transmitting mirror which is integrated into the baseplate and which stands orthogonally to the waveguide and an end mirror disposed at the other end of the resonator waveguide;
• wherein the resonator waveguide is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections of the integrated waveguide forming the resonator is provided;
• wherein two resonators with resonator waveguides of mutually equal length are integrated into the baseplate, in which the resonator waveguides of both resonators are disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in the baseplate and a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections is provided both within each individual resonator and also between the two resonators,
• wherein the straight active partial sections of the one resonator are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the other resonator, preferably orthogonally to them in the baseplate;
• wherein the deflecting sections between two successively following straight active partial sections within the integrated waveguide forming the measuring arm or within that forming the reference arm are respectively formed by a semicircular arcuate piece or by a pair of quadrant-shaped arcuate pieces, disposed in mirror image, with a straight connecting, piece disposed therebetween;
• and
• wherein the loops, composed of straight active partial sections and intermediate deflecting sections of the waveguide forming the resonator are disposed in the form of at least one oval double spiral, in which a waveguide, extending to and fro in a U shape and the parallel limb portions of which merge into one another via an end loop, is disposed so as to be wound in each instance in an oval spiral, in which a waveguide partial section extends from the outermost active partial section of the one double spiral without crossover to the adjacent double spiral.

An interferometer of the Fabry-Perot type formed using integrated-optics technology, comprising:

• a baseplate having with waveguides integrated therein;
• an entrance optical fiber supplying primary light from a laser light source, said integrated waveguides having an entrance portion extending to an edge of the baseplate and connecting in a light-conducting manner to the entrance optical fiber;
• an exit optical fiber conducting interference light away from the baseplate to a detecting device, at least one further exit portion of said integrated waveguides extending to an edge of the baseplate and connecting in a light-conducting manner to the exit optical fiber;
• a Y-shaped combining element combining the entrance portion and the exit portion into a common waveguide;
• a resonator optically disposed downstream of the common waveguide of the combining element, said resonator being formed from a partially transmitting mirror which is integrated into the baseplate and which stands orthogonally to the waveguide and an end mirror disposed at the other end of the resonator waveguide;
• wherein the resonator waveguide is disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections, in which a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections of the integrated waveguide forming the resonator is provided;
• wherein two resonators with resonator waveguides of mutually equal length are integrated into the baseplate, in which the resonator waveguides of both resonators are disposed in a plurality of loops with mutually parallel oriented straight active partial sections and intermediate deflecting sections in the baseplate and a coupling-free mutual minimum spacing of all straight active partial sections and deflecting sections is provided both within each individual resonator and also between the two resonators;
• wherein the straight active partial sections of the one resonator are disposed in a direction behaving in an extension-metrologically neutral manner in relation to the direction of the straight active partial sections of the other resonator, preferably orthogonally to them in the baseplate;
• wherein the deflecting sections between two successively following straight active partial sections within the integrated waveguide forming the measuring arm or within that forming the reference arm are respectively formed by a semicircular arcuate piece or by a pair of quadrant-shaped arcuate pieces, disposed in mirror image, with a straight connecting piece disposed therebetween;
• and
• wherein the loops, composed of straight active partial sections and intermediate deflecting sections of the waveguide forming the resonator are disposed in the form of at least one oval spiral, in which a waveguide partial sections extends from the innermost active partial section, crossing the other active partial sections of the one side of the oval spiral, to a region situated outside the oval spiral.