Solid state imaging device having silicon carbide crystal layer
AssigneeRohm Co., Ltd.
InventorKeita Nii
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Abstract
A solid state imaging device of claim 1, wherein the silicon carbide crystal layer is formed on a silicon substrate such that the insulating film is interposed between said silicon carbide crystal layer and said silicon substrate. Since the charge transfer part and the imaging part are formed in the silicon carbide layer, the device can normally operate even in a high-temperature or intensive radioactive ray environment the method for producing the device is also disclosed.
Claims2
A solid state imaging device comprising a first-conductive type layer composed of a semiconductor crystal, a second conductive-type layer including a charge transfer part and an imaging part formed in the semiconductor crystal layer, and a charge transfer electrode part formed on said charge transfer part with an insulating film sandwiched therebetween, said semiconductor crystal layer being formed of a silicon carbide crystal layer.
Dependencies are inferred from the claim text.