Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
AssigneeU.S. Philips Corporation
InventorsJohan G. Bakker, Peter E. S. J. Asselbergs
Life of this patent
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Abstract
A charged particle beam system utilizes a box-shaped cooling member accommodating the lens in order to cool the particle-optical lenses. The cooling medium is circulated between the wall of the lens and the wall of the cooling member, enabling a high transfer of heat by convection. By using a cooling liquid which is undersaturated for air and which is heated prior to its passage through the cooling duct, accumulation of air due to heating can be prevented in the cooling member.
Claims11
An electron beam system, comprising a source for emitting a beam of electrons and a focusing device which comprises at least one coil for deflecting the beam, said at least one coil comprising a cooling member which encloses the coil and which comprises a cooling duct for transporting a cooling medium, characterized in that the cooling member comprises a jacket which forms a chamber having an inlet opening and an outlet opening, the coil being accommodated in said chamber, the cooling duct comprising a space between the coil and the jacket and a first closed cooling circuit comprising a cooling liquid reservoir, and a heat exchanging element which is situated, viewed in a flow direction, between the cooling liquid reservoir and the cooling member in order to cool the cooling liquid prior to its passage through the cooling member to cool said member with liquid which is undersaturated with air.
Dependencies are inferred from the claim text.