Electron microscope

An electron microscope comprising:

• an objective lens consisting of an upper magnetic pole piece and a lower magnetic pole piece;
• a specimen stage which is disposed between the upper and lower magnetic pole pieces and on which a specimen is placed;
• means for directing an electron beam to the specimen to emit X-rays from the specimen, the portion of the specimen stage that is irradiated with the electron beam consisting of a light element, the remaining portion of the stage consisting of a heavy element;
• and
• a detection means for detecting the X-rays emitted from the specimen.

An electron microscope comprising:

• an objective lens consisting of an upper magnetic pole piece and a lower magnetic pole piece;
• a specimen stage which is disposed between the upper and lower magnetic pole pieces and on which a specimen is placed;
• means for directing an electron beam to the specimen to emit X-rays from the specimen;
• an attaching means for attaching the specimen to the specimen stage via a spacer having an open portion at the center thereof for exposing the specimen beam while contacting edges of the specimen, the portion of the spacer that is in contact with the specimen consisting of a heavy element;
• and
• a detection means for detecting the X-rays emitted from the specimen.

An electron microscope comprising:

• an objective lens consisting of an upper magnetic pole piece and a lower magnetic pole piece;
• a specimen stage which is disposed between the upper and lower magnetic pole pieces and on which a specimen is placed;
• a covering on the surface of the specimen stage composed of plural layers, one of the layers consisting of a heavy element, another layer consisting of a light element;
• means for directing an electron beam to the specimen to emit X-rays from the specimen;
• and
• a detection means for detecting the X-rays emitted from the specimen.

An electron microscope comprising:

• an objective lens consisting of an upper magnetic pole piece and a lower magnetic pole piece;
• a specimen stage which is disposed between the upper and lower magnetic pole pieces and on which a specimen is placed;
• means for directing an electron beam to the specimen to emit X-rays from the specimen;
• a covering on the surface of the specimen stage except for the portion irradiated with the electron beam, the covering consisting of a heavy element;
• and
• a detection means for detecting the X-rays emitted from the specimen.