Method for extending wafer-supporting sheet
AssigneeCasio Computer Co., Ltd.
InventorTetsuro Ueki
Life of this patent
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Abstract
In a method for extending a wafer-supporting sheet of a wafer-supporting table for dicing, the wafer-supporting sheet can be extended by using a single tool, and a total height of a wafer-supporting device can be reduced while the sheet is extended. In this wafer-supporting sheet extending method, a substantially C-shaped extension spring is arranged on a lower surface of the wafer-supporting sheet, on which a wafer divided into chips is placed, so that the sheet is extended. Thus, since the wafer-supporting sheet can be extended by a single tool (the C-shaped extension spring) and the extension spring can be made thin, the total height of the wafer-supporting device can be reduced while the sheet is extended.
Claims19
A method of extending a wafer-supporting sheet comprising:
- a step of preparing a wafer-supporting table which is constructed by attaching a circular wafer-supporting sheet to a lower surface of a ring-shaped frame, a wafer placed on an upper surface of the wafer-supporting sheet and divided into chips, and a C-shaped extension spring having an outer diameter larger than an inner diameter of the ring-shaped frame when the spring is unloaded;
- a step of contracting the extension spring by applying an external force so that the outer diameter of the spring becomes smaller than the inner diameter of the ring-shaped frame;
- a step of extending the wafer-supporting sheet by positioning a portion of the sheet, which is located inside of an inner periphery of the frame, above the frame with an external force applying to the portion of the sheet;
- a step of positioning the extension spring above the frame by inserting the extension spring from under the wafer-supporting table into an inner space surrounded by the inner periphery of the frame;
- a step of releasing the external force applied to the extension spring;
- and
- a step of releasing the external force applied to the portion of the sheet which is located inside of the inner periphery of the frame.
Dependencies are inferred from the claim text.