Method for growing a silicon carbide single crystal
AssigneeSharp Kabushiki Kaisha
InventorsKatsuki Furukawa, Yoshimitsu Tajima, Akira Suzuki
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Abstract
A method for growing a silicon carbide single crystal on a seed crystal using a molecular beam source in vacuo by means of a molecular beam epitaxy, wherein a material in the molecular beam source is silicon carbide. A silicon molecular beam source and/or an impurity molecular beam source for doping may be further used. Temperatures of the silicon carbide molecular beam source, the silicon molecular beam source, the impurity molecular beam source and the seed crystal are independently controlled. Vapor compositions are controlled by the silicon carbide molecular beam source, the silicon molecular beam source and the impurity molecular beam source.
Claims8
A method for growing a silicon carbide single crystal on a seed crystal using a plurality of molecular beam sources in vacuo by means of a molecular beam epitaxy, wherein a first material in the molecular beam sources is silicon carbide and wherein a second material in the molecular beam sources is silicon.
A method for growing a silicon carbide single crystal on a seed crystal using a molecular beam source in vacuo by means of a molecular beam epitaxy,
- wherein a material in the molecular beam source is a polycrystalline silicon carbide powder;
- and said seed crystal is a silicon carbide single crystal;
- and further wherein a temperature of said seed crystal is in the range of 1100.degree. C. to 2400.degree. C.;
- a temperature of said molecular beam source is in the range of 1800.degree. C. to 2500.degree. C.;
- and the vacuum during the growth is 10.sup.-4 to 10.sup.-8 torr.
A method for growing a silicon carbide single crystal on a seed crystal using a plurality of molecular beam sources in vacuo by means of a molecular beam epitaxy,
- wherein a material in the molecular beam sources are silicon carbide and silicon;
- and said seed crystal is a silicon carbide single crystal;
- and further wherein a temperature of said seed crystal is in the range of 1100.degree. C. to 2400.degree. C.;
- a temperature of said molecular beam source is in the range of 1800.degree. C. to 2500.degree. C.;
- and the vacuum during the growth is 10.sup.-4 to 10.sup.-8 torr.
Dependencies are inferred from the claim text.