Chemical vapor deposition apparatus
AssigneeNEC Corporation
InventorHideki Gomi
Life of this patent
Estimating the term…
Abstract
In a chemical vapor deposition apparatus in which a liquid raw material is vaporized by bubbling and the vaporized material is used as a raw material gas, an orifice is provided in a pipe between a reaction unit (a dispersion head) and a vaporizing unit (a bubbler), whereby the pressure in the vaporizing unit is controlled so that it is made higher than that in the reaction unit. Instability of the pressure in the vaporizing unit which occurs in the initial phase of film formation is eliminated so that the film formation can be stably performed.
Claims6
An atmospheric pressure chemical vapor deposition apparatus comprising a liquid raw material vaporizing unit for vaporizing a liquid raw material by bubbling said liquid raw material, and a reaction unit for depositing, at atmospheric pressure, a film made from said vaporized raw material on a substrate and a pipe having a branch for exhaustion of said vaporized raw material and connecting said liquid raw material vaporizing unit with said reaction unit, said pipe having an orifice between the branching portion of said pipe and the connecting portion of said pipe with said liquid raw material vaporizing unit so as to control the pressure in said liquid raw material vaporizing unit resulting in said pressure being higher than that in said reaction unit.
An atmospheric pressure chemical vapor deposition apparatus comprising a mass flow controlling means for introducing a bubbling gas, a liquid raw material vaporizing unit for vaporizing a liquid raw material by bubbling said liquid raw material gas, heating means for keeping the temperature of said vaporizing unit constant, a mass flow controller for introducing an oxidizing agent, a reaction unit for depositing, at atmospheric pressure a film made from said vaporized raw material on a substrate and a pipe having a branch pipe for exhaustion of said vaporized raw material and connecting said liquid raw material vaporizing unit with said reaction unit, said pipe having an orifice between the branching portion of said pipe and the connecting portion of said pipe with said liquid raw material vaporizing unit so as to control the pressure in said liquid raw material vaporizing unit resulting in said pressure being higher than that in said reaction unit.
Dependencies are inferred from the claim text.