Installation and process for the distribution of very high purity nitrogen
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorFrancois Venet
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Abstract
The conduits (1-4) of length L have a linear section S.sub.1 and contain a volumetric flow rate of nitrogen Q such that, to obtain a molar concentration of impurities upon out-gassing less than C.sub.max, Q/S.sub.1 is not less than 9.5.times.10.sup.-9 L/C.sub.max. The conduits are of stainless steel with a low carbon content, not electropolished and/or chemically treated. The joints (6, 7, 9, 11) between the conduits and/or the active members (5) are maintained externally in a neutral protective atmosphere confined in a sealed casing (8, 9 . . . ) Application particularly to electronic industries.
Claims14
Installation for the distribution of a very high purity nitrogen, comprising at least one series of delivery conduits and active members, wherein the delivery conduits include conduit portions having a length L, a linear section S.sub.1 and undergoing a volumetric flow Q of delivered nitrogen such as, in order to obtain a molar concentration of out-gassing impurities less than C.sub.max, Q/S.sub.1 is not less than 9.5.times.10.sup.-9 L/C.sub.max, said conduit portions being made of stainless steel having a carbon content less than 0.05% and being free from electro-polishing and internal chemical treatment.
Process for the distribution of a very high purity nitrogen, which comprises:
- providing an installation having at least one series of delivery conduits and active members, wherein the delivery conduits include conduit portions having a length L, a linear section S.sub.1 and undergoing a volumetric flow Q of delivered nitrogen such as, in order to obtain a molar concentration of out-gassing impurities less than C.sub.max, Q/S.sub.1 is not less than 9.5.times.10.sup.-9 L/C.sub.max, said conduit portions being made of stainless steel having a carbon content less than 0.05% and being free from electro-polishing and internal chemical treatment, and purging said installation with a current of nitrogen under turbulent flow at the time of start-up.
Dependencies are inferred from the claim text.