Slicing machine employing an axial force to provide rigidity to a rotary blade
AssigneeTokyo Seimitsu Co., Ltd.
InventorsIchiro Katayama, Yoshio Kamoshita
Life of this patent
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Abstract
A slicing machine for slicing an ingot using a rotary blade that maintains the inner peripheral cutting edge of the blade in a highly rigid state. The slicing machine slices the ingot into thin pieces by use of an inner peripheral cutting edge of a doughnut-shaped rotary blade in which an axial force is applied to the blade prior to slicing in order to displace the blade in an axial direction. The inner peripheral cutting edge of the blade is kept rigid and the ingot is sliced accurately. The displacement of the blade is stored and controlled by a control unit.
Claims13
A slicing machine for slicing a crystal ingot in thin pieces, the crystal ingot being supported for movement in a first direction, the slicing machine comprising:
- a chuck body;
- a doughnut-shaped rotary blade supported by said chuck body at an outer edge and having an inner cutting edge;
- and
- means for applying an axial force to said rotary blade prior to starting of the slicing to thereby displace said inner cutting edge in an axial direction with respect to the outer edge of said rotary blade, wherein the crystal ingot is sliced while said inner cutting edge of said rotary blade is displaced and said means for applying an axial force controls the axial displacement of the inner cutting edge of said rotary blade by applying air pressure to the inner cutting edge of said rotary blade, said axial displacement of the inner cutting edge of said rotary blade being achieved by varying a clearance between said means for applying an axial force and said inner cutting edge of said rotary blade.
A slicing machine for slicing an ingot into thin wafers, the slicing machine comprising:
- an ingot support means for holding the ingot and moving the ingot to and through a slicing position;
- a chuck body;
- a doughnut-shaped rotary blade mounted by stretching onto said chuck body, an inner peripheral cutting edge of said rotary blade cutting the ingot;
- at least one air pad being means for applying an axial force in a vicinity of said inner peripheral cutting edge prior to slicing to produce a displacement of said rotary blade in the vicinity of said inner peripheral cutting edge and providing rigidity thereto, said at least one air pad proximate the slicing position;
- at least one sensor for detecting the position of said inner peripheral cutting edge;
- a control means for adjusting the axial force applied for positioning said inner peripheral cutting edge of said rotary blade to the determined position by said at least one air pad based upon an input of said at least one sensor;
- a cantilever beam supported by the slicing machine at one end;
- and
- a drive mechanism mounted at an opposite end of said cantilever beam, said drive mechanisms having means for applying an axial force mounted thereto, wherein said drive mechanism advances and retracts said means for applying an axial force with respect to said inner peripheral edge of said rotary blade to achieve a variation in clearance between said means for applying an axial force and said rotary blade.
A slicing machine for slicing an ingot into thin wafers, the slicing machine comprising:
- an ingot support means for holding the ingot and moving the ingot to and through a slicing position;
- a chuck body;
- a donut-shaped rotary blade mounted by stretching onto said chuck body, an inner peripheral cutting edge of said rotary blade cutting the ingot;
- at least one air pad being means for applying an axial force in a vicinity of said inner peripheral cutting edge prior to slicing to produce a displacement of said rotary blade in the vicinity of said inner peripheral cutting edge and providing rigidity thereto, said at least one air pad proximate the slicing position;
- at least one sensor for detecting the position of said inner peripheral cutting edge;
- control means for adjusting the axial force applied for positioning said inner peripheral edge of said cutting blade to the determined position by said at least one air pad based upon the input of said at least one sensor;
- a cantilever beam supported by the slicing machine;
- a plate spring between said cantilever beam and the slicing machine providing the support;
- and
- an end of said cantilever beam away from said plate spring having said means for applying an axial force mounted thereto, wherein varying of a clearance between said means for applying an axial force and said rotary blade is achieved by moving a weight along said cantilever beam.
Dependencies are inferred from the claim text.