Beam scanning galvanometer with spring supported mirror

A beam scanning galvanometer comprising:

• a mirror attached to a substantially cylindrical member having a thickness;
• the member being rotatably supported on springs;
• the mirror having a thickness;
• the mirror having an axis of oscillation that is displaced from a reflecting surface of the mirror a first distance;
• and
• the first distance being no greater than about the thickness of the mirror plus one half of the thickness of the member.

Apparatus for scanning a beam of light across a surface of a workpiece, said apparatus comprising:

• a movable mirror member;
• at least two sets of crossed spring members adapted to moveably support the mirror member;
• each spring member having two free ends;
• the mirror member having at least two substantially identical notches formed therein;
• each of the notches having two planar sides;
• each of the planar sides being oriented at a predetermined angle relative to the other planar side;
• and
• each of the planar sides being adapted for attachment to one of the free ends of one of the spring members so as to produce an alignment of the cross-over points of the spring members.

A beam scanning galvanometer comprising:

• a mirror attached to a magnet;
• the magnet being rotatably supported on springs;
• the magnet being surrounded with a driving coil having a center of force;
• and
• the mirror having an axis of oscillation that is substantially aligned with the center of force of the coil.

A beam scanning galvanometer comprising:

• a mirror attached to a magnet;
• the magnet being adapted to socialite about an axis that is aligned substantially with a central axis of the magnet;
• the magnet being moveably attached to a fixed support with springs;
• the magnet having cavities formed therein;
• the axis of oscillation of the magnet passes through the cavities;
• and
• the springs which attach the magnet to the fixed support being positioned substantially within the cavities.

A beam scanning galvanometer comprising:

• a mirror member adapted to oscillate about an axis;
• the mirror member being moveably attached to a fixed position of the beam scanning galvanometer with springs;
• the springs being adapted to produce torque on the mirror member when it is oscillated;
• the mirror member and the springs having a natural frequency of oscillation;
• a coil surrounding the mirror member;
• the coil being adapted to generate a magnetic field that produces torque in the mirror member;
• and
• the torque producible by the coil being high enough to cause rotational movement of the mirror member about the axis of oscillation at a speed higher than that which would result from the mirror member oscillating at its natural frequency.

A beam scanning galvanometer comprising:

• an oscillating mirror member;
• the mirror member being adapted to oscillate about an axis that is aligned substantially with a central axis of the member;
• the mirror member being movably attached to a fixed portion of the beam scanning galvanometer with springs;
• the mirror member having cavities formed therein;
• the axis of oscillation of the mirror member passes through the cavities;
• and
• the springs being positioned within the cavities.