Flexographic apparatus having a temperature control device embedded in a substrate support and method for forming patterned films using the apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMasaaki Suzuki, Mayumi Yoshioka, Yasuyuki Watanabe
Life of this patent
Estimating the term…
Abstract
A flexographic apparatus including a plate having a relief pattern for printing on a substrate to be printed is provided with a temperature control, preferably embedded within a stage for supporting the substrate to be printed. The substrate to be printed may be controlled at a temperature above 30.degree. C. Patterned organic polymer films and inorganic oxide films can be formed.
Claims9
A flexographic apparatus, comprising a plate having a relief pattern for printing on a substrate to be printed, a stage for supporting the substrate to be printed, and a temperature control means embedded within the stage.
A method for forming a patterned film on a substrate, comprising:
- supporting a substrate on a stage in a flexographic apparatus,
- applying to the substrate a solution of organic polymer or a solution of inorganic oxide precursor by means of a plate having a relief pattern thereon, and
- controlling the temperature of the substrate during the applying step by use of a temperature control means embedded within the stage.
Dependencies are inferred from the claim text.