Filtered cathodic arc source
Assigneeas represented by the United States Department of Energy
InventorsSteven Falabella, David M. Sanders
Life of this patent
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Abstract
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
Claims20
A filtered cathodic arc ion source, comprising:
- a first housing;
- a second housing;
- said first housing being connected to said second housing at about a 45.degree. angle;
- a cathode assembly mounted in said first housing;
- a first anode mounted in said first housing;
- a second anode mounted in said second housing;
- a first magnetic coil positioned around at least a section of said first housing;
- a second magnetic coil mounted with respect to said second housing and located intermediate said first coil and said second anode;
- and
- baffle means mounted in at least said first housing;
- whereby ions produced by said cathode assembly are directed through said first and second housings to a point of use, and macro-particles produced by said cathode are trapped by said baffles and prevented from passing through said first and second housings.
In a cathodic arc ion source having a cathode, an anode, and a pair of magnetic coils operatively mounted to a housing, the improvement comprising:
- said pair of coils being mounted in an end-to-end relation, but positioned at a 45.degree. angle to each other;
- and
- including an auxiliary annular anode positioned adjacent an end of one of said pair of coils.
A method for substantially removing macro-particles produced in a cathodic arc ion source, comprising the steps of:
- forming a housing having a 45.degree. bend therein;
- positioning a cathode and a first annular anode in one end of the housing;
- positioning a second annular anode in an opposite end of said housing;
- providing a pair of solenoids in an end-to-end relationship, but bent at 45.degree. with respect to one another;
- positioning the pair of solenoids so that each of the pair are on opposite sides of the 45.degree. bend in the housing;
- providing a plurality of non-magnetic annular baffles in the housing so as to be located on both sides of the 45.degree. bend in the housing, and supplying appropriate electrical power to the cathode, the anodes, and the solenoids;
- whereby ions produced by the cathode are guided by a magnetic field, extending from the first anode to the second anode, from the cathode through the 45.degree. bend in the housing to a point of use located beyond the second anode, and whereby macro-particles produced by the cathode are reflected and trapped by the annular baffles preventing the macro-particles from passing through the entirety of the housing.
Dependencies are inferred from the claim text.