Gas supply apparatus
AssigneeNEC Corporation
InventorAtsushi Ito
Life of this patent
Estimating the term…
Abstract
According to this invention, a gas supply apparatus includes a bomb, a mass flow controller, a valve, and a heating means. The bomb is filled with a liquid gas. The mass flow controller controls a flow rate of an evaporated gas supplied from the bomb to supply the liquid gas having a vapor pressure lower than an atmospheric pressure to a vacuum vessel evacuated at a predetermined degree of vacuum through a long pipe. A valve is arranged between the bomb and the mass flow controller and performs supply/interruption of the gas flowing into the mass flow controller. A heater heats the mass flow controller, the valve, and a pipe for connecting the mass flow controller and the valve.
Claims5
A gas supply apparatus comprising:
- a bomb filled with a liquid gas;
- a mass flow controller connected immediately after said bomb via an internal pipe leading to a vacuum vessel, said mass flow controller controlling a flow rate of a gas obtained by evaporating the liquid gas from said bomb in order to supply the gas at a vapor pressure which is lower than atmospheric pressure to said vacuum vessel which is evacuated to a predetermined degree of vacuum through an external pipe, the gas being sent through said external pipe at a pressure which is lower than said vapor pressure;
- a valve, arranged between said bomb and said mass flow controller, for performing a supply/interruption of the gas flowing into said mass flow controller;
- and
- heating means for heating said mass flow controller, said valve, and at least a portion of said internal pipe between said mass flow controller and said valve.
A gas supply system comprising:
- a gas supply apparatus including a bomb filled with a liquid gas, a mass flow controller which is connected to an internal pipe at a point which is just after said bomb, said mass flow controller controlling a flow rate of a gas obtained by evaporating the liquid gas in said bomb in order to supply the gas at a vapor pressure which is lower than atmospheric pressure, a valve arranged between said bomb and said mass flow controller, said valve performing a supply/interruption of the gas flowing into said mass flow controller, and heating means for heating said mass flow controller, said valve and at least a portion of said internal pipe between said mass flow controller and said valve, the gas being sent to an external pipe at a pressure which is lower than said vapor pressure,
- a vacuum device connected to said gas supply apparatus, said vacuum device including a vacuum pump and a vacuum vessel evacuated at a predetermined pressure by said vacuum pump;
- and
- said external pipe being connected between said gas supply apparatus and said vacuum device for sending the gas from said mass flow controller to said vacuum vessel at a pressure which is lower than said vapor pressure.
Dependencies are inferred from the claim text.