Minute particle loading method and apparatus

A solder ball loading apparatus comprising:

• supply means for defining an enclosed space over a solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by a solder ball push-up shaft to said enclosed space with compressed air;
• stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times;
• suction means for loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls;
• and
• recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

A solder ball loading apparatus comprising:

• storage means for storing a large number of solder balls to be used for forming solder bumps of a semiconductor device;
• separator means for taking out the solder balls in number required for one cycle of forming said solder bumps by vertically moving a solder ball push-up shaft, which has a recess at the upper end thereof, within said storage means;
• supply means for defining an enclosed space over a light-transmittable solder ball holder having numerous through holes which are different in diameter on the opposite surfaces thereof, so that solder balls can be placed and loaded on the surface of said solder ball holder in which larger-diameter ones of said holes are exposed, and for supplying the solder balls taken out by said solder ball push-up shaft to said enclosed space with compressed air;
• stirring-up means for stirring up said solder balls within said enclosed space by repeating the supply and stoppage of the compressed air to said enclosed space at least two times;
• suction means for positively loading said solder balls in said solder ball holder under suction by sucking said solder balls via said through holes of said solder ball holder, while stirring up said solder balls;
• detector means for detecting whether or not said solder balls are loaded in desired positions on said solder ball holder, by illuminating light to said solder ball holder and visually recognizing shades of said solder balls caused by the illuminated light;
• control means for controlling said respective means to supply, stir up and suck said solder balls when the result that said solder balls have not yet been loaded in all the desired positions is visually recognized, so that the supply, stirring-up and suction of said solder balls are repeated until said solder balls are loaded in all the desired positions;
• and
• recovery means for recovering from said enclosed space those ones of said solder balls which are not loaded in said solder ball holder under suction, by introducing the compressed air into said enclosed space again.

A minute particle holding apparatus comprising:

• a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected for the other side of said minute particle holder means opposite to said holding surface;
• enclosed space defining means for defining an enclosed space over said holding surface of said holder means;
• and
• stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that minute particle therein are placed and held int the greater-diameter ends of said through-holes in said holder means.

A minute particle holding apparatus comprising:

• a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface at the other, opposite side of said holder means, each said through holes regularly holding minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface;
• enclosed space defining means for defining an enclosed space over said holding surface of said holder means;
• stirring-up means for stirring up minute particles in said enclosed space with a turbulent flow of a fluid so that minute particles are placed and held in said holder means;
• and
• recovering means for recovering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.

A minute particle holding apparatus comprising:

• a minute particle holder means having regularly arranged through holes, the diameter of each of said through holes being greater at one side of said minute particle holder means presenting a holding surface and smaller at the other, opposite side of said holder means, each said through holes regularly holding a minute particles at its greater-diameter end opening in said holding surface by a suction effected from the other side of said minute particle holder means opposite to said holding surface;
• enclosed space defining means for defining an enclosed space over said holding surface of said holder means;
• supply means for supplying said minute particles to said enclosed space by introducing a fluid into said enclosed space;
• stirring-up means for stirring up said minute particles in said enclosed space with a turbulent flow of a fluid so that said minute particles are placed and held in said holder means;
• and
• recovery means for covering minute particles which are not placed and held in said holder means, by introducing a fluid into said enclosed space.