Integrated-optic waveguide devices and method
AssigneeTexas Instruments Incorporated
InventorsRobert M. Boysel, Gregory A. Magel
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Abstract
It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane. Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.
Claims25
An integrated-optic device comprising:
- a. a lower cladding layer;
- b. at least one electrode located under or upon a portion of said lower cladding so as to electrostatically deflect a membrane;
- c. a core layer of material with a higher index of refraction than said lower cladding upon said lower cladding;
- d. an upper cladding layer with a lower index of refraction than said core layer formed upon said core layer, said upper cladding being selectively removable;
- and
- e. a metal layer upon said upper cladding layer, wherein said metal layer has access holes for said selected removal of said upper cladding layer, said metal layer only supported at the edges.
Dependencies are inferred from the claim text.