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US 5,273,788 AGranted
Preparation of diamond and diamond-like thin films
AssigneeUniversity of Utah
InventorBing-Kun Yu
Life of this patent
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Abstract
A layer of a hydrocarbon molecule is applied to a substrate by the Langmuir-Blodgett technique, and the surface is irradiated with a laser to decompose the layer of molecules at the surface without influencing the substrate. After decomposition the carbon atoms rearrange on the surface of the substrate to form a DLC film. The method of the invention may also be used to form other film, using a suitable molecule to produce the LB layer before irradiation.
Claims13
A method for applying diamondlike carbon (DLC) film on a substrate comprising;
- (a) depositing a Langmuir-Blodgett molecular layer of a molecule containing carbon and hydrogen on a substrate surface, and
- (b) irradiating the molecular layer with a laser beam sufficient to reform bonds between carbon atoms in the molecular layer so as to form a DLC film on the substrate.
A method for producing a film on a substrate comprising;
- (a) depositing on a substrate surface a Langmuir-Blodgett molecular layer of a molecule containing a precursor for the film, and
- (b) irradiating the molecular layer with a laser beam sufficient to reform bonds between the precursor atoms in the molecular layer so as to form a film on the substrate containing at least one buckminsterfullerene compound.
Dependencies are inferred from the claim text.