Microvalve

A valve with an inlet connector (22), at least one return connector (24), at least one outlet connector (23) and a cavity (35) formed by two chambers (33, 34), where the valve has a first stage (1), by means of which the flow direction of a fluid flow or fluid stream entering through the inlet connector (22) can be directed into one of the two chambers (33, 34), and the control of the flow direction of the fluid flow or fluid stream takes place by means of a flexible tongue (10) which, in the position of rest, is oriented parallel to the flow direction of the fluid flow or fluid stream, and furthermore has a second stage (2) having the at least one outlet connector (23), where the second stage (2) is disposed behind the first stage (1) in respect to the flow direction of the fluid flow or fluid stream, characterized in that the valve is embodied as a microvalve, where one layer of the microvalve is embodied by a structured wafer (30), that the structured wafer (30) is connected with a first covering (31) and a second covering (32), that the inlet connector (22) is formed out of the material of the wafer (30) between the first covering (31) and the second covering (32), that the inlet connector (22) terminates in a cavity (35), which is separated into a first chamber (33) and a second chamber (34) by the structured wafer (30), that the flexible tongue (10) is movable in a direction perpendicular to structured wafer (30) to control the flow direction, that the first covering (31) has the at least one outlet connector (23) and that the second covering (32) has the at least one return connector (24).