Quartz glass tube liquid heating apparatus with concentric flow paths
AssigneeAsahi Glass Company, Limited
InventorsToshihisa Kamiyama, Masanori Kawaguchi, Tetsuo Takehara
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Abstract
A liquid heating apparatus 1 has a flow path 2 surrounded by a quartz glass tube 5 inside a tubular ceramic heater 4 which radiates infrared rays and has a PTC characteristic, and a flow path 3 which is formed between two quartz glass tubes 6, 7 which are disposed outside the tubular ceramics tube 4 in a coaxial manner. The liquid heating apparatus can effectively heat purified water used for manufacturing electronics-related products without contamination of the purified water, and provides a compact size while having a high heat capacity.
Claims9
A liquid heating apparatus comprising an electric resistance heating type ceramic heater having a tubular shape, first and second flow paths for flowing liquid to be heated, which are formed in the vicinity of the inside and the outside of said tubular ceramic heater respectively, wherein said first flow path for the liquid is surrounded by a first quartz glass tube which is disposed inside said tubular ceramic heater in a coaxial manner, and said second flow path for the liquid is formed between second and third quartz glass tubes which are disposed outside said tubular ceramic heater in a coaxial manner.
Dependencies are inferred from the claim text.