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US 5,268,735 AGranted
Apparatus for observing features and defects of a sample
AssigneeInternational Business Machines Corporation
InventorRyutaro Hayashi
Life of this patent
Estimating the term…
Abstract
According to the present invention, an optical inspection apparatus which can observe a light-transmitted portion and a light-reflected portion within objects of inspection, distinguishable from each other within the same field of vision, is provided.
Claims4
An optical inspection apparatus for generating a picture image of an optical disk, wherein a first defect type is distinguishable from a second defect type in the image, the apparatus comprising:
- a first light source, having a first intensity, for irradiating a first side of a recording layer of the optical disk and reflecting light therefrom whereby features and defects of the first side are detachable;
- a second light source, having a second intensity different from the first intensity, for irradiating a second side of the recording layer and transmitting light through defects extending through the recording layer;
- a black and white video camera facing the first side for receiving the reflected light and the transmitted light in the same field of vision;
- image processing means, responsive to said black and white video camera, for generating a composite picture image signal;
- and
- a color monitor coupled for receiving the composite picture image signal from said image processing means and displaying the defects of the first side in a first color, the defects extending through the recording layer in a second color and the features of the first side in at least a third color.
3 more elements
Dependencies are inferred from the claim text.