Composite aluminum plate for physical coating processes and methods for producing composite aluminum plate and target
AssigneeVereinigte Aluminum-Werke Aktiengesellschaft
InventorsChristian M. Dumont, Norberg W. Schmitz, Hans Quaderer
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Abstract
A composite aluminum plate suitable for making targets for coating processes, and methods for making them are disclosed. The plate comprises a surface layer of pure aluminum or an alloy of pure aluminum, and a supporting layer made of a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 after being heat-treated under suitable conditions. The targets made are suitable for physical or sputter coating processes such as cathodic sputtering and magnetron sputtering.
Claims17
A composite aluminum plate for making a target for coating processes, said plate comprising:
- (1) a surface layer selected from the group consisting of pure aluminum and an alloy of pure aluminum;
- and
- (2) a supporting layer comprising a hardenable aluminum alloy having a Brinell hardness index HB ranging from at least about 50 to about 95 under suitable heating and curing conditions.
The composite aluminium plate according to claim 8 wherein said hardenable alloy is AlMgsi.
A composite aluminum plate for making a target for coating processes, said plate comprising:
- (1) a surface layer selected from the group consisting of pure aluminum and an alloy of pure aluminum;
- and
- (2) a supporting layer comprising a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 to about 95 under suitable heating and curing conditions wherein said alloying element of aluminum in said surface layer (1) is silicon.
Dependencies are inferred from the claim text.