Back to results
US 5,266,794 AGranted
Vertical-cavity surface emitting laser optical interconnect technology
AssigneeBandgap Technology Corporation
InventorsGregory R. Olbright, Jack L. Jewell
Life of this patent
Estimating the term…
Abstract
A three-dimensional optical interconnection is disclosed having a stack of vertically aligned optoelectronic integrated (OEIC) modules. Each OEIC module includes an array of vertical cavity surface emitting lasers (VCSEL), receivers and electronic logic which are monolithically integrated on a single semiconductor substrate. Communication between the OEIC modules is effectuated by the free space propagation of laser radiation from the VCSELs to corresponding receivers on an adjacent OEIC module. Transistors, such as heterojunction bipolar transistors, may be used to drive the VCSELS.
Claims22
A three dimensional optoelectronic interconnection comprising:
- a first semiconductor substrate having at least a first planar surface;
- a first array of vertical-cavity surface emitting lasers monolithically integrated in a first pattern on said first surface, each for generating radiation at a desired wavelength of operation, said radiation being emitted perpendicular to said first planar surface;
- means for generating a first set of electrical signals bearing information;
- for each laser, means responsive to said electrical signal for modulating said radiation to superimpose said information thereon;
- a second semiconductor substrate having at least a second planar surface, said first and second planar surfaces being non-coplanar;
- a first array of photoreceivers monolithically integrated in said first pattern on said second surface for receiving radiation from a corresponding laser and then converting said radiation to a second set of electrical signals;
- and
- means for processing said second set of electrical signals,
- at least one of said first and second semiconductor substrates being substantially transparent at said desired wavelength of operation, whereby the transmission and reception of said radiation between said lasers and photoreceivers establish an optoelectronic interconnection between said means for generating and said means for processing.
6 more elements
A three dimensional optoelectronic interconnection comprising
- a plurality of optoelectronic integrated circuit (OEIC) modules arranged in a vertical configuration such that each of said OEIC modules defines a planar surface substantially parallel with each other,
- each of said OEIC modules having at least a transmitter and a receiver,
- said transmitter including a heterojunction bipolar transistor (HBT) having collector, base and emitter semiconductor layers formed on said planar surface, and a vertical cavity surface emitting laser (VCSEL) for generating optical radiation at a desired wavelength of operation so that the transmission of the optical radiation from one OEIC module to a receiver on another OEIC module establishes an optoelectronic interconnection therebetween, at least one of said OEIC modules being substantially transmissive at said desired wavelength of operation, said VCSEL including, first and second mirrors, said first mirror disposed on said HBT, and an active quantum well region disposed between said first and second mirrors,
- said receiver including a heterojunction photo-transistor (HPT) having collector and emitter semiconductor layers and a floating base semiconductor layer for receiving said optical radiation, wherein said collector, emitter and floating base semiconductor layers, respectively, have the same epitaxial structure as said collector, emitter, and base semiconductor layers of said HBT.
1 more element
A three dimensional optoelectronic interconnection comprising:
- first and second planar semiconductor substrates substantially parallel with each other;
- an array of transmitters including vertical cavity surface emitting lasers (VCSELs) and transistors disposed on said first semiconductor substrate for generating optical radiation at a desired wavelength of operation, said radiation being emitted perpendicular to said first semiconductor substrate;
- and
- an array of photoreceivers disposed on said second semiconductor substrate for receiving the optical radiation from said lasers so that the transmission and reception of the optical radiation establish an optical interconnection, at least one of said first and second semiconductor substrates being substantially transparent at said desired wavelength of operation, wherein the photoreceivers and transistors each have three semiconductor layers, the respective layers of said photoreceivers and transistors having the same epitaxial structure.
1 more element
Dependencies are inferred from the claim text.