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US 5,265,113 AGranted
Integrated microsystem
AssigneeMesserschmitt-Bolkow-Blohm GmbH
InventorsThorsteinn Halldorsson, Walter Kroy, Peter Peuser, Helmut Seidel, Paul Zeller
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AssigneeMesserschmitt-Bolkow-Blohm GmbH
InventorsThorsteinn Halldorsson, Walter Kroy, Peter Peuser, Helmut Seidel, Paul Zeller
Estimating the term…
Integrated microsystem comprising electrical and nonelectrical, particularly optical functions in a laser system, wherein a base comprising anisotropically etchable semiconducting material on which etching structures for receiving optical and/or electro-optical and electrical/electronic and/or fluidic and/or mechanical elements or their mountings are arranged in predetermined distances and/or levels, as well as integrated switching circuits, and that at least a part of the optical, electro-optical or mechanical elements or their mounting is controllable and movable electrically in such a way that its position relative to the base is actively changeable, and that at least one sensor is provided which determines the effect of the position change on the function of at least a part of a microsystem and supplies a signal for repeated readjustment (self-adjusting) of optical elements and their mounting.
Integrated microsystem for electrical and nonelectrical, particularly optical means of a laser system, characterized in that it comprises a body of anisotropically etchable monocrystalline semiconductor material which takes over mechanical carrier functions for components of a solid state laser with pump diode, such as lens system, resonators, laser crystal and electronics/fluidics, which is provided with adjusting means such as V-grooves and recesses for the exact positioning of the components, and in that the semiconductor body simultaneously serves as a cooling body of the power-intensive components by means of built-in liquid cooling ducts.
Dependencies are inferred from the claim text.