Vertical heat treating apparatus
AssigneeTokyo Electron Sagami Limited
InventorKazunari Sakata
Life of this patent
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Abstract
A vertical heat treating apparatus comprises a casing having an opening through which articles to be processed are loaded and unloaded, a heat treating furnace provided in the casing, a loading and unloading mechanism provided under the heat treating furnace so as to load the articles to be processed in and unload the same from the heat treating furnace, and a clean air flow forming unit provided in a space which is formed in the casing and in which the loading and unloading mechanism is provided so as to form a clean air flow conducted from one side of the casing to the opposite side thereof.
Claims7
A vertical heat treating apparatus comprising:
- a casing having one side, a second side opposed thereto and an opening through which articles to be processed are loaded and unloaded, said casing having a space formed therein;
- a heat treating furnace provided in said casing;
- loading and unloading means provided under said heat treating furnace in said space of said casing, for loading said articles to be processed in and unloading the same from said heat treating furnace;
- and
- clean air flow forming means provided in said space in said casing for forming a clean air flow conducted from said one side of said casing to the second side thereof.
Dependencies are inferred from the claim text.