Method for bonding a lead to a die pad using an electroless plating solution
AssigneeVLSI Technology, Inc.
InventorJon M. Long
Life of this patent
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Abstract
An interconnect structure comprising an interconnection formed between a bond pad and the end of a lead. The layer includes nickel, copper, cobalt, palladium, platinum, silver or gold and is electrically conductive. Also, an apparatus for forming an interconnection by a metal plating process and a device having a lead, a substrate, and a bath containing an aqueous metal plating solution which permits formation of the interconnect structure. A method of forming an interconnect structure including the step of placing a lead adjacent to a bond pad and placing the two in an electroless plating solution so that the interconnect structure may be formed.
Claims6
A method of forming an interconnect structure between a semiconductor wafer having at least one bond pad composed of aluminum and the end of at least one lead composed of copper, said method comprising the steps of:
- securing the relative positions of said end of said lead and said at least one bond pad by a securing means so that the end and the pad are adjacent to each other;
- providing an aqueous metal plating solution;
- surrounding said at least one lead and said at least one bond pad by said plating solution to permit formation of an interconnect structure between said lead and said bond pad;
- leaving said bond pad and said lead in said plating solution for a predetermined time period until an interconnect structure having a desired thickness is formed;
- and
- removing said bond pad and said lead from said aqueous metal plating solution when an interconnect structure between said end of said lead and said bond pad having a desired thickness is formed.
Dependencies are inferred from the claim text.