Process of preventing visual access to a semiconductor device by applying an opaque ceramic coating to integrated circuit devices

Abstract

Reverse engineering of integrated circuit devices is prevented by denying visual access to the topology of an integrated circuit device. Visual access is denied by coating the device with an opaque ceramic. The opaque ceramic is produced by first mixing opaque particulate with a silica precursor. The mixture is then applied to the surface of the integrated circuit device. The coated device is heated to a temperature in the range of 50.degree. C. to 450.degree. C. in an inert environment for a time within the range of 1 second to 6 hours to allow the coating to flow across the surface of the device without ceramifying. The coated device is then heated to a temperature in the range of 20.degree. C. to 1000.degree. C. in a reactive environment for a time in the range of 2 to 12 hours to allow the coating to ceramify. The result is an integrated circuit device that is coated with opaque ceramic which prevents visual access to the underlying circuitry of the integrated circuit device while providing the device with protection against environmental stresses, ionic contamination, and mechanical abrasion.

Dependencies are inferred from the claim text.