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AssigneeMesserschmitt-Bolkow-Blohm GmbH
InventorsWalter Kroy, Helmut Seidel, Eduard Dette, Max Koniger, Peter Deimel, Florian Binder, Reinhold Hilpert
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A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.
A micromechanical structure for investigation of sample substances in a targeted manner, comprising a masked-formed, etched structure with a plurality of depressions formed in an array that is made of at least one of a group of semiconductive materials, glass, ceramic, diamond, and carbon, the masked-formed, etched structure including a bottom structure, which has a plurality of depressions formed in an array, and a lid structure, which has a plurality of humps formed in an array, the lid and bottom structures being formed so the plurality of depressions and humps are at corresponding positions and have a same geometry, and so that when the lid structure is combined with the bottom structure, the plurality of corresponding depressions and humps are in alignment and form a plurality of microcontainments for containing one or more sample substances for evaluation and/or documentation of possible changes in one or more properties of the sample substances.
Dependencies are inferred from the claim text.