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US 5,250,669 AGranted
Photosensitive compound
AssigneesWako Pure Chemical Industries, Ltd., Matsushita Electric Industrial Co., Ltd.
InventorsKazufumi Ogawa, Masayuki Endo, Keiji Ohno, Mamoru Nagoya
Life of this patent
Estimating the term…
Abstract
Photosensitive compounds having preferably a functional group such as --SO.sub.2 Cl, --SO.sub.3 H, --SO.sub.3 R, ##STR1## (R, R', R" being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and ##STR2## moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
Claims12
A compound represented by the formula:
- ##STR153## wherein R.sup.1 is ##STR154## X.sup.1 and Y.sup.1 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO.sub.2 Cl, --SO.sub.2 Br, ##STR155## --SO.sub.3 H or --SO.sub.3 R.sup.5 ;
- R.sup.3 and R.sup.4 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R.sup.3, R.sup.4 and N taken together may form a heterocyclic ring;
- R.sup.5 is a lower alkyl group having 1 to 5 carbon atoms;
- the --SO.sub.2 Cl or --SO.sub.2 Br group may include a quaternary salt thereof;
- the --SO.sub.3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof;
- m is an integer of 1 to 20;
- R.sup.2 is an alkyl group, a cycloalkyl group, a hydroxyalkyl group, an alkoxyalkyl group, ##STR156## X.sup.2 and Y.sup.2 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO.sub.2 Cl, --SO.sub.2 Br, ##STR157## --SO.sub.3 H or --SO.sub.3 R.sup.8 ;
- R.sup.6 and R.sup.7 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R.sup.6, R.sup.7 and N taken together may form a heterocyclic ring;
- R.sup.8 is a lower alkyl group having 1 to 5 carbon atoms;
- the --SO.sub.2 Cl or --SO.sub.2 Br group may include a quaternary salt thereof;
- the --SO.sub.3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof;
- n is an integer of 1 to 20.
9 more elements
Dependencies are inferred from the claim text.