Process for manufacturing finely structured bodies such as heat exchangers

A method of producing a finely structured body which is useful as a heat exchanger, a mechanical fine filter or an optical grating, which is comprised of a plurality of stacked, cut sections of foil at least one of which is provided with grooves in a selected groove direction on at least one surface thereof, and which has a plurality of closely juxtaposed, channel-like perforations with high shape accuracy, true dimensions and high surface quality, the method comprising:

• a. providing a vacuum clamping means comprised of a ground, sintered metal plate which is connected to a vacuum source and which is positioned on a work table which is movable in two mutually perpendicular directions X and Y;
• b. positioning a machinable foil on the ground, sintered metal plate and clamping the machinable foil thereto by applying an effective amount of vacuum;
• c. cutting a plurality of parallel grooves into the surface of the machinable foil by means of at least one shaping diamond positioned on a cutting spindle and adjustable in a direction Z, each groove of the plurality of grooves having a groove length, a groove width, and a cross-sectional shape that is constant over the groove length and freely selectable;
• d. cutting the grooved machinable foil into cut sections having selected lengths and widths;
• and
• e. stacking the cut sections,
• wherein the plurality of grooves have a form precision such that, for groove length of more than 1000 .mu.m, the groove width has an accuracy of about +1 .mu.m for land widths which euqal or exceed about 15 .mu.m.