Alkaline free electroless deposition
AssigneeCornell Research Foundation, Inc.
InventorsYosef Y. Shacham, Roman Bielski
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Abstract
Alkali-free layers of pure metals such as copper, nickel and cobalt were deposited on noble metal or noble metal sensitized substrates by electroless deposition using pure quaternary ammonium hydroxides or quaternary phosphonium hydroxides to generate the hydroxyl ion (OH.sup.-) needed to produce electrons for the metal reduction. Using the new alkaline-free electroless compositions, uniform, continuous and reproducible metal layers were selectively deposited with excellent electrical properties. With the improved compositions and process, nanosize copper lines having widths in the range of 100 to 500 nm were prepared.
Claims8
An electroless deposition composition, free of alkali metal and suitable for depositing a metal layer on a noble metal or noble metal sensitized substrate, comprising:
- a) a source of metal ions;
- said metal selected from the group consisting of copper, cobalt, nickel and silver;
- b) a quaternary onium hydroxide or alkoxide capable of dissociating into a quaternary onium cation and hydroxyl or alkoxyl ion;
- c) a reducing agent present in an amount sufficient to react with said hydroxyl or alkoxyl ion to generate electrons to react with said metal ions to deposit a layer of metal on the noble metal substrate,
- d) a source of cyanide ions;
- said quaternary onium compound having the formula:
- ##STR2## wherein M represents nitrogen or phosphorus, and R.sub.1, R.sub.2, R.sub.3, R.sub.4 are independently C.sub.1- C.sub.20 alkyl or cycloalkyl radicals, or C.sub.6- C.sub.20 aryl radicals, aralkyl radicals, and alkaryl radicals;
- and R.sub.5 is H or one of R.sub.1, R.sub.2, R.sub.3, and R.sub.4.
An electroless deposition composition, free of alkali metal and suitable for depositing a metal layer on a noble metal or noble metal sensitized substrate, comprising:
- a) a source of metal ions;
- said metal selected from the group consisting of copper, cobalt, nickel and silver;
- b) N-benzyltrimethylammonium hydroxide;
- c) a reducing agent present in an amount sufficient to react with hydroxyl from said N-benzyltrimethylammonium hydroxide to generate electrons to react with said metal ions to deposit a layer of metal on the noble metal substrate.
An electroless deposition composition, free of alkali metal and suitable for depositing a metal layer on a noble metal or noble metal sensitized substrate, comprising:
- a) a source of metal ions;
- said metal selected from the group consisting of copper, cobalt, nickel and silver;
- b) a phosphonium hydroxide or alkoxide capable of dissociating into a phosphonium cation and hydroxyl or alkoxyl ion;
- c) a reducing agent present in an amount sufficient to react with said hydroxyl or alkoxyl ion to generate electrons to react with said metal ions to deposit a layer of metal on the noble metal substrate,
- said phosphonium compound having the formula:
- ##STR3## wherein M represents phosphorus, and R.sub.1, R.sub.2, R.sub.3, R.sub.4 are independently C.sub.1- C.sub.20 alkyl or cycloalkyl radicals, or C.sub.6- C.sub.20 aryl radicals, aralkyl radicals, and alkaryl radicals;
- and R.sub.5 is H or one of R.sub.1, R.sub.2, R.sub.3, and R.sub.4.
Dependencies are inferred from the claim text.