US 5,240,024 A · Automated process gas supply system for evacuating a process line

Abstract

A process gas supply system at the gas supply point includes an automated means for evacuating gas in a process line fed by the process gas supply system when an abnormal event occurs. The process gas supply system of this invention eliminates the need for any special valves or piping at the point of use of the process gas as well as the need for a return line from the point of use to the process gas supply system to purge the process line. A process gas is contained in a cylinder under pressure. The cylinder is coupled to a process line by the process gas supply system. The process gas supply system includes a gas flow controller and an automatic evacuation system. The gas flow controller controls the supply of the process gas from the cylinder to the process line. In an abnormal event, process gas flow from the cylinder is blocked by the gas flow controller and the automatic evacuation system evacuates the process gas not only from the gas flow controller, but also from the process line.

Claims17

Dependent claims

A process gas supply system connectable to a process line and to a gas supply, said process gas supply system comprising:

means, operatively couplable to said gas supply and to said process line, for controlling process gas flow from said gas supply to said process line;
and
means, connectable to, and disconnectable from said process gas flow control means, for automatic evacuation of said process gas from said process gas flow control means upon an occurrence of a predetermined event thereby evacuating said process line of said process gas upon said occurrence of said predetermined event;
wherein in normal operation of said process gas supply system, said process gas flows from said gas supply through said process gas flow control means to said process line.

1 more element

A system comprising:

process gas supply means at a first location;
process gas supply system means at said first location connected to said process gas supply means;
a process line connected to said process gas supply system means;
and
apparatus, at a second location removed from said first location, connected to said process line wherein said process gas supply system means further comprises:
means, connected to said process gas supply means and to said process line, for controlling process gas flow from said process gas supply means to said process line;
and
means, connectable to, and disconnectable from said process gas flow control means, for automatic evacuation of said process gas from said process gas flow control means upon an occurrence of a predetermined event thereby evacuating said process line of said process gas upon said occurrence of said predetermined event;
wherein in normal operation of said system, said process gas flows from said process gas supply means through said process gas flow control means to said process line.

6 more elements

A gas supply system for connecting a process gas supply to a process line and for evacuating the process line in response to a predetermined event, said gas supply system comprising:

normally-closed air-operated shut-off valve means connected to said process gas supply;
pressure regulator means;
first gas line means wherein said first gas line means couples said normally-closed air-operated shut-off valve means to said pressure regulator means;
second gas line means wherein said second gas line means coupled said pressure regulator means to said process line;
vacuum generator means;
first normally-open air-operated valve means wherein said first normally-open air-operated valve means connects said first gas line means to said vacuum generator means;
and
second normally-open air-operated valve means wherein said second normally-open air-operated valve means connects said second gas line means to said first gas line means;
wherein in normal operation of said gas supply system, said normally-closed air-operated shut-off valve means is held open and said first and second air-operated valve means are held closed;
and
upon the occurrence of said predetermined event, all of said air-operated valve means return to the normal positions.

8 more elements

A gas supply system for connecting a process gas supply to a process line and for evacuating the process line in response to a predetermined event, said gas supply system comprising:

normally-closed air-operated shut-off valve means connected to said process gas supply;
pressure regulator means;
first gas line means wherein said first gas line means connects said normally-closed air-operated shut-off valve means to said pressure regulator means;
second gas line means wherein said second gas line means connects said pressure regulator means to said process line;
vacuum generator means;
first normally-open air-operated valve means wherein said first normally-open air-operated valve means connects said first gas line means to said vacuum generator means;
and
second normally-open air-operated valve means wherein said second normally-open air-operated valve means connects said second gas line means to said vacuum generator means;
wherein in normal operation of said gas supply system, said normally-closed air-operated shut-off valve means is held open and said first and second air-operated valve means are held closed;
and
upon the occurrence of said predetermined event, all of said air-operated valve means return to the normal positions.

8 more elements

Dependencies are inferred from the claim text.

Automated process gas supply system for evacuating a process line

Life of this patent

Automated process gas supply system for evacuating a process line

Life of this patent

Abstract

Claims17