Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography
AssigneeBrewer Science Inc.
InventorsTony Flaim, James Lamb, III, Kimberly A. Moeckli, Terry Brewer
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Abstract
A composition and a method for forming an anti-reflective layer for DUV microlithographic processes is disclosed. The compositions of the present invention includes a polymer dissolved in a suitable solvent. The polymers are polysulfone and polyurea polymers which possess inherent light absorbing properties at deep ultraviolet wavelengths. In accordance with the method of the present invention, these compositions are applied to a substrate to form an anti-reflective coating, and thereafter a photoresist material that is compatible with the anti-reflective coating is applied.
Claims6
A composition for forming an anti-reflective layer for DUV microlithographic processes, comprising a polymer dissolved in a suitable solvent, said polymer being opaque at deep ultraviolet wavelengths and having a functional repeat unit selected from the group consisting of:
- ##STR17## and combinations thereof, wherein R.sub.a is selected from the group consisting of:
- ##STR18## wherein R.sub.1 =R.sub.4 ;
- R.sub.2 =R.sub.3 ;
- R.sub.1, R.sub.2, R.sub.3, R.sub.4, and R.sub.5 are selected from the group consisting of hydrogen and methyl;
- and R.sub.6 is selected from the group consisting of hydrogen, methyl and phenyl;
- ##STR19## wherein R.sub.1 =R.sub.2 =R.sub.3 =R.sub.4 and are selected from the group consisting of hydrogen and methyl;
- ##STR20## wherein R.sub.1 =R.sub.2 =R.sub.3 =R.sub.4 and are selected from the group consisting of hydrogen and methyl;
- ##STR21## wherein X is selected from the group consisting of:
- ##STR22## wherein R.sub.1 =R.sub.2 =R.sub.3 =CH.sub.3 and R.sub.4 =H, or R.sub.1 =R.sub.2 =R.sub.4 =CH.sub.3 and R.sub.3 =H;
- and (G) combinations thereof;
- wherein R.sub.b is selected from the group consisting of:
- ##STR23## wherein R.sub.1 is selected from the group consisting of Cl, C.tbd.N, CH.sub.3, H, OCH.sub.3, and COOR.sub.2, wherein R.sub.2 is --CH.sub.3 or --CH.sub.2 CH.sub.3 ;
- ##STR24## wherein R.sub.1 is selected from H and C.tbd.N;
- ##STR25## wherein R.sub.1 =R.sub.2 =R.sub.3 =R.sub.4 =H or CH.sub.3 ;
- ##STR26## wherein R.sub.1 =R.sub.2 and are selected from consisting of H, CH.sub.3, OCH.sub.3, and R.sub.3 =R.sub.4 and are selected from consisting of H and CH.sub.3 ;
- ##STR27## wherein R.sub.1 =R.sub.2 =R.sub.3 =R.sub.4 =H or CH.sub.3 ;
- and (N) combinations thereof;
- wherein said suitable solvent is selected from the group consisting of cyclohexanone, cyclopentanone, 2-methoxyethyl ether, anisole, ethyl lactate, acetophenone, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate (EGMEA), propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (PGMEA), gamma butrylolactone, tetrahydrofurfuryl alcohol, N-methylpyrrolidone, N,N-dimethylacetamide, 1,1,3,3-tetramethylurea, 1,2-dimethyl-2-imidazolidinone, and mixtures thereof.
Dependencies are inferred from the claim text.