Spacers for field emission display fabricated via self-aligned high energy ablation
AssigneeMicron Technology, Inc.
InventorsDavid A. Cathey, Chris C. Yu, Trung T. Doan, Tyler A. Lowrey, J. Brett Rolfson
Life of this patent
Estimating the term…
Abstract
Fabrication of spacer supports for use in flat panel displays through a process which involves 1) depositing an insulating material on an electrode plate, 2) optionally, patterning a reflective material superjacent the insulating material, 3) irradiating the electrode plate, and thereby removing the exposed insulating material, 4) optionally, removing the reflective material, and thereby exposing the remaining insulative material which will serve as the spacer supports, after which the plate can be aligned with a complementary electrode plate, and a vacuum formed therebetween.
Claims22
A process for the formation of interelectrode support structures, said process comprising the following steps:
- depositing a first material on a substrate, said substrate being disposed on a first electrode plate;
- selectively exposing said first material to radiant energy to define the support structures;
- attaching and sealing said first electrode plate to a second electrode plate;
- and
- creating a vacuum between said first electrode plate and said second electrode plate.
A process for the formation of interelectrode support structures, said process comprising the following steps:
- applying a first material to a substrate, said substrate being disposed on a first electrode plate;
- wherein said first material is used to form said support structures;
- applying a radiation reflective material superjacent said support forming material thereby defining a pattern, whereby said radiation reflective material reflects energy at a predetermined wavelength;
- exposing said first material to laser energy at said predetermined wavelength;
- removing said radiation reflective layer;
- attaching and sealing said first electrode plate to a second electrode plate;
- and
- creating a vacuum between said first electrode plate and said second electrode plate.
An interelectrode support structure, formed by:
- depositing a first material on an electrode plate, said first material being used to form said support structures;
- selectively depositing a highly reflective material superjacent said first material, said highly reflective material defining a cross-section of said support structures, said cross-section being less than 50 .mu.m by 50 .mu.m;
- exposing said electrode plate to pulses of radiant energy, said radiant energy reflecting off said highly reflective material and ablating said first material upon which said highly reflective material was not deposited;
- and
- removing said highly reflective material, thereby exposing the first material which forms said support structures.
Dependencies are inferred from the claim text.