Switchable resonant filter for optical radiation
AssigneeTexas Instruments Incorporated
InventorsGregory A. Magel, Jon C. Zimmerman
Life of this patent
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Abstract
A structure to be used as a switchable optical filter is disclosed. The structure comprises a substrate transparent to the radiation of interest, which contains or supports an electrode. A spacer layer suspends the membrane over the electrode such that no spacer lies between the electrode and the membrane, yet some spacer remains elsewhere to support the membrane. The membrane has slots in it which are of a specified length in order to resonate at a particular wavelength of radiation. When the electrode is activated, the membrane deflects and its varying proximity to the substrate changes the wavelength of transmission. The method of manufacture is also disclosed.
Claims31
An optical filter comprising:
- a. a substrate substantially transparent to a predetermined wavelength of optical radiation;
- b. at least one electrode formed proximate said substrate;
- c. a spacer formed upon a layer containing said electrode such that said spacer does not cover said electrode;
- d. a membrane formed upon said spacer such that said membrane is suspended over said electrode, supported by said spacer;
- and
- e. slots formed in said membrane such that said slots are resonant for optical radiation of said predetermined wavelength.
An optical filter comprising:
- a. a substrate substantially transparent to a predetermined wavelength of optical radiation which has two parallel faces;
- b. at least one electrode formed proximate one of said two parallel faces;
- c. anti-reflection coatings formed upon the substrate on at least one of said two parallel faces;
- d. a spacer formed upon a layer containing said electrode such that said spacer does not cover said electrode;
- e. a membrane formed upon said spacer such that said membrane is suspended over said electrode, supported by said spacer;
- f. slots formed in said membrane such that said slots are resonant for optical radiation of a predetermined wavelength.
A method of forming an optical filter comprising:
- a. defining an electrode proximate a substrate;
- b. depositing a layer of spacer material upon said electrode;
- c. forming a membrane over said spacer;
- d. etching plasma access holes in said membrane, wherein said access holes comprise slots which are resonant at a certain wavelength of optical radiation;
- and
- e. removing said spacer material such that said material is not present over said electrode, but remains elsewhere to support said membrane, such that said membrane is operable to deflect towards said substrate when said electrode is activated.
A method for optical filtering comprising:
- a. directing optical radiation toward a membrane including at least one slot which is resonant for a selected predetermined wavelength of said optical radiation;
- b. activating an electrode proximate a substrate having a selected refractive index, said electrode for attracting said membrane;
- and
- c. moving said membrane including said slot toward said substrate to change the wavelength of said optical radiation at which said slot resonates.
An optical filter comprising:
- a. a substrate substantially transparent to a predetermined wavelength of optical radiation;
- b. at least one electrode formed proximate said substrate;
- c. a spacer formed upon a layer containing said electrode such that said spacer does not cover said electrode;
- d. a membrane substantially transparent to said predetermined wavelength formed upon said spacer such that said membrane is suspended over said electrode, supported by said spacer, wherein said membrane includes conducting members.
Dependencies are inferred from the claim text.