Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide

A scanning probe microscope comprising:

• a probe supporting member having a free end portion and a fixed end portion, the free end portion bearing a probe thereon;
• a laser light source attached to the fixed end portion of the probe supporting member;
• an optical waveguide for guiding a laser beam, emitted from the laser light source, to the free end portion;
• and
• a photoelectric transducer for receiving the laser beam delivered thereto via the free end portion and for converting the laser beam into an electrical output signal corresponding thereto.

A scanning probe microscope comprising:

• a probe supporting member having a free end portion and a fixed end portion, the free end portion bearing a probe thereon;
• a laser light source attached to the fixed end portion of the probe supporting member;
• an optical waveguide for guiding a laser beam, emitted from the laser light source, to an opening in a distal end face of the free end portion;
• a first photoelectric transducer for receiving the laser beam emitted from the opening and converting the laser beam into an electrical output signal;
• an optical element arranged in the optical waveguide, for deflecting the laser beam in a direction perpendicular to the longitudinal axis of the optical waveguide;
• a second photoelectric transducer for receiving the laser beam deflected by means of the optical element and converting the laser beam into an electrical output signal;
• and
• arithmetic processing means for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing.

A scanning probe microscope comprising:

• a probe supporting member having a free end portion and a fixed end portion, the free end portion bearing a probe thereon;
• a laser light source attached to the fixed end portion of the probe supporting member;
• an optical waveguide for guiding a laser beam, emitted from the laser light source, to an opening in a distal end face of the free end portion;
• and
• a photoelectric transducer for receiving the laser beam emitted from the opening and converting the laser beam into an electrical output signal.

A scanning probe microscope comprising:

• a probe supporting member having a free end portion and a fixed end portion, the free end portion bearing a probe thereon;
• a laser light source attached to the fixed end portion of the probe supporting member and emitting a laser beam to the free end portion;
• an optical element arranged on said free end portion, for dividing the laser beam into laser beams in at least two perpendicular directions;
• a photoelectric transducer for receiving the divided laser beams and converting the laser beams into electrical output signals corresponding thereto;
• and
• arithmetic processing means for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing.