Capacitor and pressure transducer

Abstract

A dual capacitor device for utilizing dependent capacitances for measurement purposes where an upper capacitor base member and a lower capacitance base member are arranged with parallel capacitor surfaces in horizontal planes and where the parallel capacitor surfaces are located on opposite sides relative to a vertical axis to define first and second capacitors. The lower capacitor base member has a centrally located section connected to an outer section of the lower capacitor base member by a torsion beam and the centrally located section is attached to the upper capacitor base member by a vertical arm member. The torsion beam means has a displacement axis normal to the central axis so that angular displacement of the torsion beam and the centrally located section about the displacement axis produces a capacitance change in the first and second capacitors. A force moment applied to the centrally located section by a spirally wound bourdon tube in response to pressure develops a low force on the torsion beam which is less than the micro yield point of the torsion beam material and develops a micro dimensional angular displacement of the centrally located section and a capacitance change as a function of the force to measure high pressures with small deflections of the capacitor. The structure is arranged to compensate for changing temperature.

Dependencies are inferred from the claim text.