Slit valve apparatus and method
AssigneeApplied Materials, Inc.
InventorsAvi Tepman, Dana L. Andrews
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsAvi Tepman, Dana L. Andrews
Estimating the term…
A slit valve apparatus associated with an aperture in a chamber wall through which a semiconductor wafer may be passed along a transfer plane. The apparatus is characterized by a valve seat which is angled relative to the transfer plane and a door which moves linearly along an axis substantially perpendicular to the valve seat. All frictionally engaged parts of the slit valve assembly are isolated from the interior of the chamber by a bellow sleeve to reduce the formation of particles. The method is characterized by the steps of surrounding the aperture with a first seating surface defining a sealing plane which is angularly disposed with respect to the transfer plane and engaging or disengaging a second seating surface with the first seating surface by linearly moving the second seating surface in a direction perpendicular to the sealing plane.
A slit valve apparatus, comprising:
A slit valve apparatus comprising:
A method for selectively opening and closing an elongated substantially rectangular aperture provided in a wall through which solid objects may be passed substantially parallel to a transfer plane comprising the steps of:
A method for selectively opening and closing an elongated aperture provided in a wall through which solid objects may be passed substantially parallel to a transfer plane comprising the steps of:
A slit valve apparatus, comprising:
A method for selectively opening and closing an elongated substantially rectangular aperture provided in a wall which separates a first chamber from a second chamber, said aperture permitting the passage of a solid object from said first chamber to said second chamber along a transfer plane, said method comprising the steps of:
Dependencies are inferred from the claim text.