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US 5,225,251 AGranted
Method for forming layers by UV radiation of aluminum nitride
AssigneeAsea Brown Boveri AG
InventorHilmar Esrom
Life of this patent
Estimating the term…
Abstract
A process for forming layers on a substrate including irradiating at least part of an aluminum nitride surface with a high power ultraviolet emitter resulting in the elimination of the nitride component to form an aluminum layer. The aluminum layer is then reinforced by a metal.
Claims2
A process for forming layers on a substrate, which comprises providing a substrate completely formed of aluminum nitride or having a layer of aluminum nitride disposed on its surface;
- irradiating at least part of a surface of the substrate or of the aluminum nitride layer with a high power emitter having a gas filling of krypton fluoride and emitting ultraviolet radiation in a range of substantially from 240 nm to 270 nm, resulting in the elimination of
- the nitride component from the aluminum nitride surface for forming an aluminum layer;
- reinforcing the remaining aluminum layer with a layer of a material selected from the group consisting of copper, gold, nickel and zinc having a thickness of not more than 30 .mu.m with a process selected from the group consisting of electroless metal deposition, chemical vapor deposition and electrolytic metallization.
Dependencies are inferred from the claim text.