Single wafer processor with a frame
AssigneeSemitool, Inc.
InventorsRaymon F. Thompson, Aleksander Owczarz
Life of this patent
Estimating the term…
Abstract
A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.
Claims14
A wafer processing apparatus, comprising:
- a stationary frame;
- at least one processing base and a complementary processing head mounted to the frame, the processing base and complementary processing head being moveable relative to one another between a closed relative position forming a substantially enclosed processing space for containing processing fluids between the processing base and the processing head and an open relative position allowing transfer of wafers to and from the processing head;
- means for moving the processing base and complementary processing head relative to one another;
- and
- wafer transfer means on the frame for directing individual wafers between the processing head and one or more wafer carriers.
A wafer processing apparatus, comprising:
- a stationary frame;
- at least one processing station on the frame;
- each processing station including a fixed processing base having an upwardly open bowl and a complementary processing head having a peripheral shroud adapted to cover the bowl;
- gripper means on the processing head for selectively engaging the edges of a wafer;
- and
- movable support means operably connected between the processing head and the frame for selectively shifting the processing head between an open transfer position clear of the processing base and a closed processing position wherein a wafer engaged by the gripper means is positioned within the bowl of the processing base.
A wafer processing apparatus, comprising:
- a stationary frame;
- at least one processing station on the frame;
- each processing station including a fixed processing base having an upwardly open bowl centered about a reference axis and a coaxial complementary processing head having a peripheral shroud adapted to cover the bowl;
- gripper mean on the processing head and overlapped by the shroud for selectively engaging the edges of a wafer;
- and
- movable support means to one side of the processing head and processing base operably connected between the processing head and the frame for selectively moving the processing head relative to the processing base between an open transfer position where the processing head is clear of the processing base and a closed processing position wherein the processing head encloses the processing base and a wafer engaged by the gripper means is positioned within the bowl of the processing base.
Dependencies are inferred from the claim text.