Organometallic precursors in conjunction with rapid thermal annealing for synthesis of thin film ceramics
AssigneeThe Trustees of the University of Pennsylvania
InventorsJorge J. Santiago-Aviles, Donald H. Berry
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Abstract
An organometallic precursor mixture is formed containing desired components of a final ceramic. This precursor mixture is dissolved in an organic solvent. The dissolved mixture is then spin cast or otherwise evenly deposited onto a wafer substrate. Finally, the coated wafer substrate is annealed by a process of Rapid Thermal Annealing to produce a thin ceramic film and to remove any organic material. This process exhibits preferential crystal growth to produce a uniform thin film.
Claims12
A method for manufacturing a film ceramic comprising:
- providing an organometallic precursor;
- dissolving said precursor in an organic solvent;
- depositing the dissolved organometalic precursor onto a substrate;
- and
- heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form the ceramic film on said substrate.
An improved method of manufacturing an electric, electronic, or mechano-electric device having electrically conductive elements comprising:
- manufacturing one or more of said electrically conductive elements by the process of dissolving an organometallic precursor in an organic solvent;
- depositing said dissolved organometallic precursor onto a substrate to be used in said electrically conductive element;
- and
- heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form a ceramic film on said substrate.
Dependencies are inferred from the claim text.