Bridge electrodes for microelectromechanical devices

Apparatus for detection of motion of a micromechanical transducer element included in a microelectromechanical transducer formed in a substrate comprising:

• an electrode extending as a bridge from a first point to a second point on a surface of said substrate, and over a portion of said transducer;
• a conductor in electrical contact with said bridge electrode operative to provide electrical connection to said bridge electrode;
• a buried electrode within said substrate, said buried electrode extending under at least a portion of said transducer element, and confronting said bridge electrode;
• and
• a conductor in electrical contact with said buried electrode, for providing electrical connection to said buried electrode, and for providing at least one of balanced application of forces and symmetry for symmetrical motion detection to said transducer element when paired and utilized with said bridge electrode.

Apparatus for application of force to a micromechanical transducer element included in a microelectromechanical transducer formed in a substrate comprising:

• an electrode extending as a bridge from a first point to a second point on a surface of said substrate, and over a portion of said transducer;
• a conductor in electrical contact with said bridge electrode operative to provide electrical connection to said bridge electrode;
• a buried electrode within said substrate, said buried electrode extending under at least a portion of said transducer element, and confronting said bridge electrode;
• and
• a conductor in electrical contact with said buried electrode, for providing electrical connection to said buried electrode, and for providing at least one of balanced application of forces and symmetry for symmetrical motion detection to said transducer element when paired and utilized with said bridge electrode.

A bridge electrode assembly formed by a photolithographic process on a substrate, for use in conjunction with a microelectromechanical transducer that includes a transducer element, said assembly comprising:

• an electrode extending as a bridge from a first point to a second point on a surface of said substrate, and over at least a portion of said transducer element;
• a conductor in electrical contact with said bridge electrode, for providing electrical connection to said bridge electrode;
• and
• a shielding electrode disposed between said bridge electrode and said transducer element, and extending from said substrate surface over a portion of said transducer element less than the portion over which said bridge electrode extends.

A bridge electrode assembly formed by a photolithographic process on a substrate, for use in conjunction with a microelectromechanical transducer that includes a transducer element, said assembly comprising:

• an electrode extending as a bridge from a first point to a second point on a surface of said substrate, and over at least a portion of said transducer element;
• a conductor in electrical contact with said bridge electrode, for providing electrical connection to said bridge electrode;
• a buried electrode within said substrate, said buried electrode extending under at least a portion of said transducer element, and confronting said bridge electrode;
• a conductor in electrical contact with said buried electrode, for providing electrical connection to said buried electrode, for providing at least one of balanced application of forces and symmetry for symmetrical motion detection to said transducer element when paired and utilized with said bridge electrode;
• and
• a shielding electrode disposed between said bridge electrode and said transducer element, and extending from said substrate surface over a portion of said transducer element less than the portion over which said bridge electrode extends.