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US 5,212,703 AGranted
Surface emitting lasers with low resistance bragg reflectors
AssigneeEastman Kodak Company
InventorKeith B. Kahen
Life of this patent
Estimating the term…
Abstract
A vertical cavity surface emitting laser is disclosed including a lower cladding layer of a particular conductivity type deposited on the semiconductor substrate, having multiple periods of semiconductor layers of varying index cf refraction so deposited as to form a .lambda./2 Bragg reflector; and an upper cladding layer of opposite conductivity type having multiple periods of semiconductor layers of varying index of refraction so deposited as to form a multilayer reflector.
Claims8
A vertical cavity surface emitting laser, comprising:
- (a) a semiconductor substrate of one conductivity type;
- (b) a lower cladding layer of similar conductivity type deposited on the semiconductor substrate, having multiple periods of semiconductor layers of varying index of refraction so deposited as to form a .lambda./2 Bragg reflector;
- (c) a semiconductor active layer formed on the lower cladding layer;
- (d) an upper cladding layer of opposite conductivity type deposited on the semiconductor active layer, having multiple periods of semiconductor layers of varying index of refraction so deposited as to form a multilayer reflector;
- (e) deposited on the upper cladding layer;
- and
- (f) electrically conductive layers, deposited on the substrate and cap layers.
4 more elements
Dependencies are inferred from the claim text.