Calibration technique for monochromators and spectrophotometers
AssigneeApplied Materials, Inc.
InventorsMonoocher Birang, Kien Chuc, Ronnie Northrup, Bruno Strul
Life of this patent
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Abstract
A photometer having a plurality of input fibers to its optical entrance, at least one of which is for transmission of calibration light and at least one of which is for transmission of sample light. The exit ends of these fibers are aligned into a linear array, thereby producing an effective entrance slit for the optical entrance of the photometer. The fiber(s) for calibration light are positioned at the center of the linear array to avoid miscalibration due to photometer astigmatism.
Claims6
An optical test apparatus comprising:
- a photometer having an optical entrance for input of an optical signal;
- at least one optical fiber having an exit end at said optical entrance for transmission of sample light to the photometer optical entrance;
- at least one optical fiber having an exit end at said optical entrance for transmission of calibration light to the photometer optical entrance;
- and
- means for aligning said exit ends of all of these optical fibers into a linear array
- wherein at least one optical fiber is utilized to carry light from a calibration source to said optical entrance, said at least one optical fiber for carrying calibration light is positioned at the optical entrance in such a way that, over a wavelength range of the test apparatus, minimizes astigmatic misalignment of a pair of peaks, a first of these peaks being produced in response to light of wavelength .lambda. transmitted only through said at least one calibration fiber and the other of these two peaks being produced in response to light of wavelength .lambda. transmitted only through said at least one fiber for transmission of sample light.
An optical test apparatus comprising:
- a photometer having an optical entrance for input of an optical signal;
- at least one optical fiber having an exit end at said optical entrance for transmission of sample light to the photometer optical entrance;
- at least one optical fiber having an exit end at said optical entrance for transmission of calibration light to the photometer optical entrance;
- means for aligning said exit ends of all of these optical fibers into a linear array;
- and
- an entrance slit between said optical fibers and said optical entrance of the photometer, wherein the exit ends of the optical fibers are spaced from the entrance slit by a few times a smallest diameter of these optical fibers.
An optical test apparatus comprising:
- a photometer having an optical entrance for input of an optical signal;
- at least one optical fiber having an exit end at said optical entrance for transmission of sample light to the photometer optical entrance;
- at least one optical fiber having an exit end at said optical entrance for transmission of calibration light to the photometer optical entrance;
- means for aligning said exit ends of all of these optical fibers into a linear array;
- and
- a tungsten filament mercury vapor lamp as a source of calibration light, whereby only low voltage levels are required for the calibration light source.
Dependencies are inferred from the claim text.