Method and apparatus for selecting and measuring a capacitance from a plurality of interconnected capacitances
AssigneeIntergraph Corporation
InventorRobert J. Proebsting
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AssigneeIntergraph Corporation
InventorRobert J. Proebsting
Estimating the term…
A method and apparatus for measuring capacitances in the pressure of stray capacitances is disclosed. A high frequency voltage signal is applied to a first node of the capacitor being tested. The frequency and change in voltage of the signal is known and measured precisely. The current flowing through the small capacitor is measured during a known portion of the signal's period. The measuring period is chosen so that the stray capacitances charge and discharge during the period, thereby adding no net current to the measured current. As the measured current, frequency, and change in voltage are all known precisely, the capacitance of the test capacitor can be calculated precisely. For testing capacitances in semiconductor wafers, a plurality of test structures comprised of a plurality of test capacitances are fabricated on the wafers. Using known decoding methods and apparatus, individual capacitances within individual test structures can be accessed and measured, using the method of the present invention.
An apparatus for coupling signals to a plurality of capacitances comprising:
A method for coupling signals to a plurality of capacitances, each capacitance having first and second terminals, each first and second terminal of each capacitance being coupled to one of the first or second terminals of another one of the plurality of capacitances at a node so that the plurality of capacitances are interconnected through a plurality of nodes, the method comprising the steps of;
The method according to claim 9 further comprising the step of providing a signal to the input terminal of the first multiplexer having a predefined frequency and predefined low and high voltage levels.
A method for measuring the capacitance of a selected one of a plurality of capacitances, each capacitance having first and second terminals, each first and second terminal of each capacitance being coupled to one of the first or second terminals of another one of the plurality of capacitances at a node so that the plurality of capacitances are interconnected through a plurality of nodes, the method comprising the steps of;
Dependencies are inferred from the claim text.