Method for manufacturing oxide superconducting films by laser evaporation

A method for manufacturing a layer of an oxide-ceramic superconductor material having a high superconducting transition temperature and high current capacity, on the basis of a cuprate system containing metallic constituents and oxygen, comprising directing a pulsed laser with a wavelength in the ultraviolet spectral range at a target material of the system to vaporize the target material on to a single crystalline or polycrystalline substrate, applying a heat treatment and an oxygen treatment of the deposited material to form a desired superconducting metal-oxide phase with an at least partially ordered crystal structure, the heat treatment and the oxygen treatment being performed simultaneously during the vaporizing step, and comprising the steps of:

• providing a power density of the laser radiation directed at the target material of more than 3J/cm.sup.2 ;
• providing a pulse power of the laser of at least 12.5 J/pulse;
• raising the temperature of the substrate to a temperature of between 600.degree. C. and 800.degree. C.;
• and
• providing an atmosphere with a partial pressure of oxygen of between 0.02 mbar and 1 mbar, whereby the desired superconducting metal-oxide phase with a transition temperature of at least 77.degree. K. is at least partially developed in-situ on said substrate.