Apparatus and method for focusing hard X-rays
AssigneeHughes Aircraft Company
InventorsVictor Vali, David B. Chang, Albert F. Lawrence
Life of this patent
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AssigneeHughes Aircraft Company
InventorsVictor Vali, David B. Chang, Albert F. Lawrence
Estimating the term…
A dislocation-free, composite-substance crystal having a lattice constant which decreases over the length of the crystal (38) convergently focuses beams of hard X-rays or gamma rays (11). A single-substance, dislocation-free crystal (34) collimates diffuse beams of hard X-rays or gamma rays and projects the collimated radiation (11') to the focusing crystal (38). A mask (36) is interposed between the collimating crystal (34) and the focusing crystal (38) causing the collimated radiation (11'') to carry an image of the mask (36). The focusing crystal (38) produces a convergent hard X-ray beam or gamma ray beam (11''') to focus a reduced image of the mask (36) upon the photosensitive layer (41) of a wafer (39). An example of a dislocation-free crystal having a lattice constant which decreases over its length (38) is a dislocation-free silicon-germanium crystal (20) wherein the proportion of germanium to silicon varies over the length of the crystal.
An apparatus for forming an image comprising:
An apparatus for projecting an image defined by a mask onto a surface comprising:
A method for convergently focusing a hard X-ray image or gamma ray image onto a surface comprising:
An apparatus for focusing hard X-rays or gamma rays comprising a crystal formed according to parameters to produce a lattice constant which decreases over a length thereof to create a focal spot having a diameter s at a focal length f defined in the equation ##EQU3## where s is the diameter of the focal spot, 1.22 represents a proportionality constant, D is a diameter of an end of said crystal which receives the hard X-rays or gamma rays, lambda is a wavelength of the hard X-ray or gamma rays and f is the focal length of said crystal.
A system for manufacturing an article comprising:
An apparatus for focussing hard X-ray or gamma ray radiation, said apparatus including:
Dependencies are inferred from the claim text.