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US 5,210,455 AGranted
Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Koji Kimura
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Abstract
A piezoelectric/electrostrictive actuator including a ceramic substrate (2, 10, 16, 22, 38) and a piezoelectric/electrostrictive portion (26, 28, 29, 30, 33a, 33b, 36a, 36b, 37, 39). The ceramic substrate has at least one recess (6, 14, 20, 24, 42) having a bottom surface which defines a thin-walled portion (8a, 22a), and the piezoelectric/electrostrictive portion is formed on the thin-walled portion of the ceramic substrate.
Claims11
A piezoelectric/electrostrictive actuator comprising:
- an integrated ceramic substrate
- having at least one recess having a bottom surface which defines a thin-walled portion, said thin-walled portion having an average ceramic particle size of 0.1-2 .mu.m;
- and
- a piezoelectric/electrostrictive portion integrated with said thin-walled portion of said ceramic substrate, said piezoelectric/electrostrictive portion being formed on said thin-walled portion by a film-forming process and subsequent heat treatment for integration with said ceramic substrate.
1 more element
Dependencies are inferred from the claim text.